Available Refurbished Equipment

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Available Equipments CANON Aligner MPA500FAb / MPA600FA / MPA600Super PLA501FA / PLA600FA


Refurbishment Contents Consumable parts replacement Broken parts replacement or O/H Cover repainting Each unit adjustment to OEM spec Installation Maintenance Periodic maintenance Unit O/H Available spare parts 1: UM01, 02 Mirror recoat (MPA) 2: Illumination mirror, Lens (PLA / MPA) 3: Consumable parts Conversion On request Past Performance MPA series: 40 sets PLA series: 41 sets

Available Equipments HITACHI CDSEM S-6000 series / S-7000 series / S-8000 series S-9000 series


Refurbishment Contents Consumable parts replacement Broken parts replacement or O/H Cover repainting Each unit adjustment to OEM spec Installation Maintenance Robot O/H Pump O/H Chip replacement Conversion 1: SMIF conversion (S-8000 / S-9000) 2: Inch conversion (4 / 5 / 6 / 8 inch) Past Performance S-8000 series: 4 sets S-9000 series: 3 sets

Available Equipments WATKINS JOHNSON APCVD WJ998 (BPSG, TEOS) / WJ999 (BPSG, TEOS) WJ1000 BPSG, TEOS)


Refurbishment Contents Consumable parts replacement Broken parts replacement or O/H Pipe and gas line replacement Each unit adjustment Installation Maintenance Periodic maintenance Orifice O/H MKS valve O/H Available spare parts 1: Belt 2: N2 shield 3: Transfer motor 4: Roller 5: Injector