| Part# | Description | Qty |
|---|
| 0010-05256 | ASSEMBLY, HEATER, 6", DXZ | 1 |
| 0020-04131 | HANDLE INSULATOR | 2 |
| 0020-13047 | WAFER, ALUMINUM CALIBRATION | 1 |
| 0020-21699 | BRACKET MOUNT LASER SEE | 2 |
| 0020-21901 | BRACKET | 8 |
| 0020-23095 | BRACKET,A.L.L. CASSETTE SENSOR 200MM | 2 |
| 0020-31492 | GAS DISTRIBUTION PLATE, 101 HOLES | 1 |
| 0020-34587 | LID PLATE, DXZ VIEW LID | 1 |
| 0020-34775 | BLOCKER, PERF,SILOX 8",UNIV CH,NON-STEPP | 1 |
| 0021-09097 | PLATE, LINER ALIGNMENT, VESPEL | 1 |
| 0021-39748 | BLOCKER, PERF, SILANE, NITRIDE550 | 1 |
| 0035-00074 | TOP SHIELD | 2 |
| 0040-02804 | COVER, UPS, CENTURA | 1 |
| 0040-32149 | CHAMBER HEATER for Centura DxZ | 1 |
| 0040-39551 | LID, PUMPING PLATE, TEOS, DXZ, DCVD | 1 |
| 0040-75626 | COVER, EMO BRACKET CENTURA | 2 |
| 0090-70015 | ASSEMBLY 4 WAY DOUBLE FOR SLIT | 1 |
| 0140-76284 | H/A, AUX SWITCH | 2 |
| 0190-09659 | LINEAR SLIDE, LUBRICATED | 1 |
| 0190-35019 | BRG 4-POINT CONTACT SPECIAL 6" | 4 |
| 0190-35292 | LEAD SCREW ASSEMBLY | 1 |
| 0190-70075 | BRG BALL 1.0 BORE 1.375O.D. 3/32" BALLS | 8 |
| 0190-70076 | BRG BALL 1/8"6.00 BORE 6.50 O.D. LVP GRE | 8 |
| 0190-75073 | BALL SCREW ASSY, LEFT HAND, SPEC | 2 |
| 0190-76003 | BALL,LNR/ROTARY 1.250 ID X 2.000 OD... | 4 |
| 0200-01119 | SHADOW RING, QUARTZ, 200MM NOTCH (2) TG, | 3 |
| 0200-09448 | PLATE,QTZ,GAS DIST, LOWER, 150MM, PRSP3 | 3 |
| 0200-09969 | WINDOW, SIDE, UV COATED, SAPPHIRE, DXZ | 2 |
| 0200-09974 | SHIELD, L-SUPPORT,PUMPING INSERT | 1 |
| 0200-09977 | COVER,QUARTZ 200MM,NOTCH (2),HI-PROFILE, | 1 |
| 0200-10163 | ISOLATOR, SIN, ENHANCED, PUMPING LID, DX | 1 |
| 0240-20021 | LIST,BASIC SHIELD PARTS | 1 |
| 0240-21356 | KIT LOAD LOCK SAFETY SHIELD | 2 |
| 0240-25480 | KIT, ADV 101 REST BTNS-FULL CVRG PED. | 2 |
| 0240-27885 | ENDURA/CENTURA PIK 8" CONSUMABLE KIT- 1 | 2 |
| 0240-75084 | KIT, AL 101% REST AND RETAIN BUTTONS | 4 |
| 0870-01028 | DRVR 5-PHASE STEPPER MOTOR | 1 |
| 1200-01581 | RLY TIMER PNEU .1-40SEC OFF-DELAY FOR | 2 |
| 3030-00096 | MFC 8161 DIG 10SLM N2 1/4VCR MTL NC HO | 2 |
| 3030-01517 | MFC STEC 4400MC 200 SCCM N2 (ZDE) | 1 |
| 3030-06953 | MFC4400 300SCCM N2$S 1/4VCR MTL N/C 9P-D | 1 |
| 3070-01004 | BELLOWS 4" SS | 2 |
| 3690-03269 | BRG LEADSCR&NUT ASSY .5DX.1LEADX4TRVLX | 2 |
| 3700-01714 | ORING ID 1.600 CSD .210 CHEMRAZ SC513 80 | 1 |
| 3700-01928 | ORING ID 2.109 CSD .139 KALREZ-4079 75DU | 2 |
| 3700-01929 | ORING ID 2.987 CSD .103 KALREZ-4079 75DU | 3 |
| 3700-01932 | ORING ID 1.612 CSD .103 KALREZ-4079 75DU | 3 |
| 3700-02103 | ORING ID 5.109 CSD .139 CHEMRAZ SC513 WH | 1 |
| 3700-02105 | ORING ID 10.484 CSD .139 CHEMRAZ SC513 W | 4 |
| 3700-02106 | ORING ID 8.484 CSD .139 CHEMRAZ SC513 WH | 3 |
| 3700-02135 | ORING ID 11.484 CSD .139 CHEMRAZ SC513 | 2 |
| 3700-02173 | ORING ID 1.989 CSD .070 KALREZ 2037 | 1 |
| 3700-02213 | ORING ID 14.115 CSD .139 CHEMRAZ 513 80 | 1 |
| 3700-02262 | ORING ID 5.859 CSD .139 4079 KALREZ BLK | 4 |
